DINAMO – Digitalisation Route for Dimensional Nanometrology

Projects

Advancing traceability in dimensional nanometrology

Through the European project DINAMO (Digitalisation Route for Dimensional Nanometrology), VSL collaborates with international partners to develop a digitalisation route for dimensional nanometrology. The project focuses on improving the traceability, reliability and reproducibility of measurement results, with a particular emphasis on scanning probe microscopy.

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Walter Knulst
Principal Scientist Length & Optics

wknulst@vsl.nl

Challenge: linking raw data to final results

In dimensional nanometrology, the connection between raw measurement data and the final calculated parameter value is often lost because acquisition and analysis steps are not fully documented. As a result, different processing approaches may lead to different outcomes from the same dataset.

DINAMO addresses this challenge by developing a digital workflow in which all steps between data acquisition and data processing are automatically captured. This creates a clear and traceable link between the original measurement data and the final reported result.

VSL’s contribution

VSL contributes to the identification and implementation of metadata solutions for virtual calibration standards. This includes documenting key calibration parameters such as signal amplitude, waveform, frequency and phase when applying smart calibration samples.

The virtual standards also offer unique capabilities, including optimisation of data acquisition processes and the reduction of 1/f noise in measurement data, supporting more accurate and reliable measurements.

Expected outcomes

The project will deliver new virtual calibration standards for step-height and lateral measurements. Key project activities include:

Defining specifications for virtual calibration standards;
Performing uncertainty analyses;
Developing and manufacturing new virtual calibration standards;
Participating in interlaboratory comparisons to validate the developed standards.

DINAMO supports the digital transformation of dimensional nanometrology and contributes to future measurement solutions for advanced technology and semiconductor applications.

More information about the research can be found on the project website.

“The project receives funding from the European Partnership on Metrology, co-funded by the European Union’s Horizon Europe Research and Innovation Programme and by the participating states.”

Projects

Our expertise in practice

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Digital metrological twins for advanced manufacturing

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Virtual experiments and digital twins (ViDiT)

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Metrology for Aerosol Optical Properties (MAPP 19ENV04)

The goal of this project is to enable the Si-traceable measurements of column-integrated aerosol optical properties retrieved from the passive remote sensing of atmosphere using solar and lunar measurements.

RMG Research on optical microscopes (Research Mobility Grant 20FUN02-RMG1)

This Research mobility grant together with EMPIR project 20FUN02 POLight aims to enhance multiple optical measurement methods for use in nano-metrology.