Semiconductors

Metrology for Next‑Gen Chips, Power Electronics and Photonics

VSL supports chip manufacturers, equipment builders and suppliers with independent, ultra‑precise measurements and standards at the nano and microscale. This gives you objective references for processes, tooling and new technologies.

Introduction

Metrology Is Indispensable for the Semiconductor Industry

 

In the production of advanced chips, PICs and power electronics, every nanometre and every picosecond counts. New node generations, 3D architectures and wide‑bandgap materials such as SiC and GaN are increasing complexity. At the same time, pressure on price and time‑to‑market is high.

Without an independent reference, you do not always have clear answers to questions such as: what is the true critical dimension of this structure? How reliable is my measurement at extreme aspect ratios? Or how does a new device perform under cryogenic conditions? Without traceable references, it is difficult to benchmark technologies, substantiate specifications and convincingly demonstrate that you comply with standards and agreements.

Would you like to know more about our services?

Our experts are happy to help.

Michael van Schaik
Sr. Accountmanager

vsl@vsl.nl

The Role of Metrology in the Semicon Value Chain

 

Metrology provides the independent basis that allows you to:

  • Calibrate and verify dimensions, shapes and roughness down to the nanoscale level
  • Characterise electrical and RF properties of devices on‑wafer and in packaging.
  • Benchmark new sensor technology, photonic building blocks and quantum devices.
  • Determine the efficiency and reliability of power electronics objectively.

 

Through traceable standards and hybrid measurement strategies (for example AFM combined with optical techniques and on‑wafer measurements), you create a robust reference framework for your own inline metrology.

How VSL Supports the Semiconductor Industry

 

VSL has a specialised role within the Dutch and European semiconductor sector, with services that support both R&D and production, including:

  • Development and application of advanced nanometrology techniques (AFM, scatterometry, ptychography) for characterisation of nanostructures.
  • Calibration of optical systems, including NA calibrations of microscope objectives, for traceable microscopy.
  • On‑wafer DC and RF characterisation of components, including measurements at cryogenic temperatures in collaboration with quantum partners.
  • Support around metrology for photonics and integrated photonics – for example in characterisation of optical losses, light fields and bonded connections.
  • Measurements and methods for evaluating power electronics, focusing on efficiency, thermal behaviour and reliability.

 

VSL also works closely with universities, research institutes and industry in national and European projects, so you benefit from the latest metrological insights without having to build a full primary measurement laboratory yourself.

Accelerate Semicon Innovation with Independent Metrology

 

Are you working on new nodes, PICs, quantum devices or WBG power electronics and looking for independent validation or calibration? Or do you want to align your metrology roadmap with international standards? VSL helps you substantiate your choices and reduce risks in R&D and scale‑up.

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