Tactile scanning behaviour of a microCMM

R.H. Bergmans, H.J. Nieuwenkamp, G.J.P. Kok, “Tactile scanning behaviour of a microCMM”, Proceedings of the 14th Euspen international conference, 2014, Dubrovnik, June 2014.

Within the European Metrology Research Program a three year project is running to measure high quality optical surfaces of lenses and mirrors. It is the projects’ goal to achieve fundamental improvements on the nanometer scale. The focus of VSL is on the improvement of tactile single-point scanning techniques of microCMMs. A 3D-microCMMs has the advantage of being able to measure almost every object, even those with steep slopes. Challenges are that due to the complex nature of a 3D measurement and the interaction between probe and work piece, no universal measurement uncertainty can be stated. Tactile probing can be done by static-point probing or by continuously scanning the surface. It has been shown that for static-point probing on the F25 microCMM, probing deviations occur for (strongly) curved surfaces [1]. When scanning additional effects such as stick-slip, synchronization errors come into play. Investigations into the scanning behaviour of the F25 are presented by measurements based on the ISO 10360-4 scanning acceptance test. Finally, we will discuss how the effects influence the measurement result of aspherical lenses and how optimal measurement strategies can be chosen.

For more information contact rbergmans@vsl.nl