{"id":7309,"date":"2023-08-15T11:56:48","date_gmt":"2023-08-15T09:56:48","guid":{"rendered":"https:\/\/www.vsl.nl\/?p=7309"},"modified":"2025-09-10T17:06:14","modified_gmt":"2025-09-10T15:06:14","slug":"traceable-metrology-of-soft-x-ray-to-ir-optical-constants-and-nanofilms-for-advanced-manufacturing-20ind04-atmoc","status":"publish","type":"post","link":"https:\/\/www.vsl.nl\/en\/projects\/traceable-metrology-of-soft-x-ray-to-ir-optical-constants-and-nanofilms-for-advanced-manufacturing-20ind04-atmoc\/","title":{"rendered":"Traceable metrology of soft X-ray to IR optical constants and nanofilms for advanced manufacturing (20IND04 ATMOC)"},"content":{"rendered":"<div class=\"wpb-content-wrapper\"><p>[vc_section full_width=&#8221;stretch_row&#8221; content_placement=&#8221;middle&#8221; css=&#8221;.vc_custom_1692080169546{background-image: url(https:\/\/www.vsl.nl\/wp-content\/uploads\/2022\/11\/Lab-Foto-WEB-10.jpg?id=2180) !important;background-position: center !important;background-repeat: no-repeat !important;background-size: cover !important;}&#8221; el_class=&#8221;main_header gradient_header dg-position-realtive&#8221;][vc_row equal_height=&#8221;yes&#8221; content_placement=&#8221;middle&#8221; el_class=&#8221;dg-header&#8211;small&#8221;][vc_column width=&#8221;5\/6&#8243; el_class=&#8221;dg-padding-none&#8221;][vc_column_text css=&#8221;.vc_custom_1692079894569{margin-bottom: 0px !important;padding-bottom: 0px !important;}&#8221; el_class=&#8221;text-white&#8221;]<\/p>\n<h1>Traceable metrology of soft X-ray to IR optical constants and nanofilms for advanced manufacturing (20IND04 ATMOC)<\/h1>\n<p>[\/vc_column_text][\/vc_column][vc_column width=&#8221;1\/6&#8243;][\/vc_column][\/vc_row][\/vc_section][vc_section el_class=&#8221;dg-padding-mid&#8221;][vc_row equal_height=&#8221;yes&#8221; content_placement=&#8221;top&#8221;][vc_column width=&#8221;2\/3&#8243; el_class=&#8221;full_width_responsive dg-padding-none&#8221;][vc_column_text css=&#8221;.vc_custom_1692079970394{padding-right: 10% !important;}&#8221; el_class=&#8221;full_width_responsive dg-padding-none&#8221;]<\/p>\n<p class=\"header_subtext\">Projects<\/p>\n<h2>Traceable metrology of soft X-ray to IR optical constants and nanofilms for advanced manufacturing (20IND04 ATMOC)<\/h2>\n<p>The optics and semiconductor industries use innovative materials and complex nanostructures in their products whose optical properties are difficult to measure and often not accurately known. This project is developping advanced mathematical methods to traceably characterise these materials for wavelength ranges from soft X-ray to IR. This will be achieved by creating a database of optical constants with associated uncertainties for bulk materials and ultra-thin film systems and industrially relevant datasets. This database will provide the opportunity to relevant industries to run simulations and eventually develop new materials with tailored properties. The overall objective of the project is to develop traceable measurement techniques for optical constants of thin-film systems and nanostructures and to use these techniques to support the introduction of an improved optical properties database for industrial users.[\/vc_column_text][vc_column_text el_class=&#8221;full_width_responsive dg-padding-none&#8221;]<\/p>\n<h2>Our role<\/h2>\n<p>VSL is leading the work package which focuses on traceability of advanced photon-based metrology. The aim of this work package is to develop traceable reflectometers, Mueller ellipsometers, and scatterometers. All the measurement techniques, which are needed to obtain a reliable determination of optical constants in thin films materials, including samples endowed with complex geometries, will be developed and characterised in this work package. VSL scatterometry specialists at length and optics group are working on the scatterometer characterization and traceable measurements of the nanostructures. Data science and modelling group is working on advanced inverse modelling and uncertainty evaluation.[\/vc_column_text][vc_column_text el_class=&#8221;full_width_responsive dg-padding-none&#8221;]<strong>Start date:<\/strong> July 1, 2021<br \/>\n<strong>End date:<\/strong> June 30, 2024[\/vc_column_text][vc_column_text el_class=&#8221;full_width_responsive dg-padding-none&#8221;]Read more about this project <a href=\"https:\/\/www.atmoc.ptb.de\/home\/\">here<\/a>.[\/vc_column_text][vc_column_text el_class=&#8221;full_width_responsive dg-padding-none&#8221;]<em>&#8220;The project has received funding from the European Partnership on Metrology, co-financed by European Union Horizon Europe Research and Innovation Programme and from the Participating States.\u201d<\/em>[\/vc_column_text][\/vc_column][vc_column width=&#8221;1\/3&#8243; css=&#8221;.vc_custom_1757516765733{margin-top: 0px !important;margin-right: 0px !important;margin-bottom: 0px !important;margin-left: 0px !important;padding-top: 0px !important;padding-right: 0px !important;padding-left: 0px !important;}&#8221; el_class=&#8221;tablet_expert full_width_responsive&#8221;]<div class=\"templatera_shortcode\"><section class=\"vc_section\"><div class=\"vc_row wpb_row vc_row-fluid full_width_responsive\"><div class=\"dg-specialist--inner dg-padding--none-inner wpb_column vc_column_container vc_col-sm-12\"><div class=\"vc_column-inner vc_custom_1757057705883\"><div class=\"wpb_wrapper\">\n\t<div  class=\"wpb_single_image wpb_content_element vc_align_left  vc_custom_1757059575052  dg-expert--image\">\n\t\t\n\t\t<figure class=\"wpb_wrapper vc_figure\">\n\t\t\t<div class=\"vc_single_image-wrapper   vc_box_border_grey\"><img decoding=\"async\" width=\"500\" height=\"333\" data-src=\"https:\/\/www.vsl.nl\/wp-content\/uploads\/2025\/09\/Lauryna-Siaudinyte.jpg\" class=\"vc_single_image-img attachment-full lazyload\" alt=\"\" title=\"Lauryna-Siaudinyte\" data-srcset=\"https:\/\/www.vsl.nl\/wp-content\/uploads\/2025\/09\/Lauryna-Siaudinyte.jpg 500w, https:\/\/www.vsl.nl\/wp-content\/uploads\/2025\/09\/Lauryna-Siaudinyte-300x200.jpg 300w\" data-sizes=\"(max-width: 500px) 100vw, 500px\"  data-dt-location=\"https:\/\/www.vsl.nl\/en\/?attachment_id=26963\" src=\"data:image\/svg+xml;base64,PHN2ZyB3aWR0aD0iMSIgaGVpZ2h0PSIxIiB4bWxucz0iaHR0cDovL3d3dy53My5vcmcvMjAwMC9zdmciPjwvc3ZnPg==\" style=\"--smush-placeholder-width: 500px; --smush-placeholder-aspect-ratio: 500\/333;\" \/><\/div>\n\t\t<\/figure>\n\t<\/div>\n<div class=\"vc_row wpb_row vc_inner vc_row-fluid dg-padding--square vc_custom_1757057909078 vc_row-o-equal-height vc_row-o-content-middle vc_row-flex\"><div class=\"dg-padding--none-inner dg-expert--inner-content wpb_column vc_column_container vc_col-sm-12\"><div class=\"vc_column-inner vc_custom_1757058090823\"><div class=\"wpb_wrapper\">\n\t<div class=\"wpb_text_column wpb_content_element  vc_custom_1757510893821 dg-expert--content-header\" >\n\t\t<div class=\"wpb_wrapper\">\n\t\t\t<h3>Would you like to know more about our services?<\/h3>\n<p>Our experts are happy to help.<\/p>\n\n\t\t<\/div>\n\t<\/div>\n\n\t<div class=\"wpb_text_column wpb_content_element  vc_custom_1757059473994 sector_specialist\" >\n\t\t<div class=\"wpb_wrapper\">\n\t\t\t<p><b>Lauryna Siaudinyte<\/b><br \/>\nPrincipal Scientist Electricity<\/p>\n\n\t\t<\/div>\n\t<\/div>\n\n\t<div class=\"wpb_raw_code wpb_raw_html wpb_content_element vc_custom_1757059491753\" >\n\t\t<div class=\"wpb_wrapper\">\n\t\t\t<i class=\"far fa-envelope green_icon\"><\/i> <a class=\"custom_link_specialist\" href=\"mailto:lsiaudinyte@vsl.nl\"> lsiaudinyte@vsl.nl<\/a>\n\t\t<\/div>\n\t<\/div>\n<\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/section><\/div>[\/vc_column][\/vc_row][\/vc_section][vc_section full_width=&#8221;stretch_row&#8221; el_class=&#8221;dg-padding-mid&#8221; css=&#8221;.vc_custom_1669644694568{background-color: #fafafa !important;}&#8221;][vc_row css=&#8221;.vc_custom_1641224545247{margin-bottom: 0px !important;padding-bottom: 0px !important;}&#8221;][vc_column width=&#8221;2\/3&#8243; el_class=&#8221;dg-padding-none&#8221;][vc_column_text css=&#8221;.vc_custom_1672324944721{margin-bottom: 0px !important;padding-bottom: 0px !important;}&#8221;]<\/p>\n<p class=\"header_subtext\">Projects<\/p>\n<h3>Our expertise in practice<\/h3>\n<p>Read more about our projects.[\/vc_column_text][\/vc_column][vc_column width=&#8221;1\/3&#8243;][\/vc_column][\/vc_row][vc_row el_class=&#8221;dg-padding-small-top&#8221;][vc_column el_class=&#8221;dg-padding-none&#8221;][vc_basic_grid post_type=&#8221;post&#8221; max_items=&#8221;10&#8243; element_width=&#8221;3&#8243; item=&#8221;256&#8243; grid_id=&#8221;vc_gid:1757516757407-e55bf923-cbba-7&#8243; taxonomies=&#8221;9&#8243;][\/vc_column][\/vc_row][\/vc_section]<\/p>\n<\/div>","protected":false},"excerpt":{"rendered":"<p>The optics and semiconductor industries use innovative materials and complex nanostructures in their products whose optical properties are difficult to measure and often not accurately known. This project is developping advanced mathematical methods to traceably characterise these materials for wavelength ranges from soft X-ray to IR.<\/p>\n","protected":false},"author":3,"featured_media":7306,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"inline_featured_image":false,"footnotes":"","_links_to":"","_links_to_target":""},"categories":[82,51],"tags":[],"class_list":["post-7309","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-digitalisation","category-projects","category-82","category-51","description-off"],"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.2 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>Traceable metrology of soft X-ray to IR optical constants and nanofilms for advanced manufacturing (20IND04 ATMOC) - VSL<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.vsl.nl\/en\/projects\/traceable-metrology-of-soft-x-ray-to-ir-optical-constants-and-nanofilms-for-advanced-manufacturing-20ind04-atmoc\/\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Traceable metrology of soft X-ray to IR optical constants and nanofilms for advanced manufacturing (20IND04 ATMOC) - VSL\" \/>\n<meta property=\"og:description\" content=\"The optics and semiconductor industries use innovative materials and complex nanostructures in their products whose optical properties are difficult to measure and often not accurately known. 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