{"id":7295,"date":"2023-08-15T11:57:20","date_gmt":"2023-08-15T09:57:20","guid":{"rendered":"https:\/\/www.vsl.nl\/?p=7295"},"modified":"2025-09-10T17:12:20","modified_gmt":"2025-09-10T15:12:20","slug":"pushing-boundaries-of-nano-dimensional-metrology-by-light-20fun02-polight","status":"publish","type":"post","link":"https:\/\/www.vsl.nl\/en\/projects\/pushing-boundaries-of-nano-dimensional-metrology-by-light-20fun02-polight\/","title":{"rendered":"Pushing boundaries of nano-dimensional metrology by light (20FUN02 POLight)"},"content":{"rendered":"

[vc_section full_width=”stretch_row” content_placement=”middle” css=”.vc_custom_1692078748644{background-image: url(https:\/\/www.vsl.nl\/wp-content\/uploads\/2023\/08\/VSL_labs-243-scaled.jpg?id=7298) !important;background-position: center !important;background-repeat: no-repeat !important;background-size: cover !important;}” el_class=”main_header gradient_header dg-position-realtive”][vc_row equal_height=”yes” content_placement=”middle” el_class=”dg-header–small”][vc_column width=”5\/6″ el_class=”dg-padding-none”][vc_column_text css=”.vc_custom_1692078200087{margin-bottom: 0px !important;padding-bottom: 0px !important;}” el_class=”text-white”]<\/p>\n

Pushing boundaries of nano-dimensional metrology by light (20FUN02 POLight)<\/h1>\n

[\/vc_column_text][\/vc_column][vc_column width=”1\/6″][\/vc_column][\/vc_row][\/vc_section][vc_section el_class=”dg-padding-mid”][vc_row equal_height=”yes” content_placement=”top”][vc_column width=”2\/3″ el_class=”full_width_responsive dg-padding-none”][vc_column_text css=”.vc_custom_1692078387824{padding-right: 10% !important;}” el_class=”full_width_responsive dg-padding-none”]<\/p>\n

Projects<\/p>\n

Pushing boundaries of nano-dimensional metrology by light (20FUN02 POLight)<\/h2>\n

Innovative devices, such as nanochips, high-capacity memories, novel materials and future point-of-care tools all rely on the ability to shape matter at the nanoscale. Thus, the European Commission has identified four Key Enabling Technology (KETs) (i.e. nanotechnology, micro-nanoelectronics, photonics and advanced materials) as strategically important for the European Union (EU). However, the fast-paced technological progress of these four KETs is currently creating a \u201cmetrology gap\u201d when compared to the progress in developing metrology methods, critical for validating the development of KETs. This project addresses this issue by developing novel methods to help bridge the metrology gap and in turn foster KET innovation. More specifically, this project will push the boundaries of optical measurement methods by realising a new generation of optical metrology systems, with unprecedented performances in terms of spatial resolution, traceability, reliability and robustness. The overall goal of this project is to push the boundaries of optical measurement methods by realising a new generation of optical metrology systems, with unprecedented performances in terms of spatial resolution, traceability, reliability, and robustness.[\/vc_column_text][vc_column_text el_class=”full_width_responsive dg-padding-none”]<\/p>\n

Our role<\/h2>\n

In this project VSL is leading a work package which focuses on Far-field optical nanometrology within the Rayleigh regime. Scatterometry specialists develop accurate methods for measuring nanostructures using far-field illumination far-field detection optical methods such as optical scatterometry with structured illumination, coherent Fourier scatterometry (CFS) and ptychography. VSL is also actively participating in development of innovative imaging methods based on engineering the spatial shape of light in the classical and quantum domain.[\/vc_column_text][vc_column_text el_class=”full_width_responsive dg-padding-none”]Start date:<\/strong> September 1, 2021
\nEnd date:<\/strong> August 31, 2024[\/vc_column_text][vc_column_text el_class=”full_width_responsive dg-padding-none”]Read more about this project here<\/a>.[\/vc_column_text][vc_column_text el_class=”full_width_responsive dg-padding-none”]“The project has received funding from the European Partnership on Metrology, co-financed by European Union Horizon Europe Research and Innovation Programme and from the Participating States.\u201d<\/em>[\/vc_column_text][\/vc_column][vc_column width=”1\/3″ css=”.vc_custom_1757517129835{margin-top: 0px !important;margin-right: 0px !important;margin-bottom: 0px !important;margin-left: 0px !important;padding-top: 0px !important;padding-right: 0px !important;padding-left: 0px !important;}” el_class=”tablet_expert full_width_responsive”]

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Would you like to know more about our services?<\/h3>\n

Our experts are happy to help.<\/p>\n\n\t\t<\/div>\n\t<\/div>\n\n\t

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Lauryna Siaudinyte<\/b>
\nPrincipal Scientist Electricity<\/p>\n\n\t\t<\/div>\n\t<\/div>\n\n\t

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\n\t\t\t<\/i> lsiaudinyte@vsl.nl<\/a>\n\t\t<\/div>\n\t<\/div>\n<\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/section><\/div>[\/vc_column][\/vc_row][\/vc_section][vc_section full_width=”stretch_row” el_class=”dg-padding-mid” css=”.vc_custom_1669644694568{background-color: #fafafa !important;}”][vc_row css=”.vc_custom_1641224545247{margin-bottom: 0px !important;padding-bottom: 0px !important;}”][vc_column width=”2\/3″ el_class=”dg-padding-none”][vc_column_text css=”.vc_custom_1672324944721{margin-bottom: 0px !important;padding-bottom: 0px !important;}”]<\/p>\n

Projects<\/p>\n

Our expertise in practice<\/h3>\n

Read more about our projects.[\/vc_column_text][\/vc_column][vc_column width=”1\/3″][\/vc_column][\/vc_row][vc_row el_class=”dg-padding-small-top”][vc_column el_class=”dg-padding-none”][vc_basic_grid post_type=”post” max_items=”10″ element_width=”3″ item=”256″ grid_id=”vc_gid:1757517123042-8087e9c3-4591-9″ taxonomies=”9″][\/vc_column][\/vc_row][\/vc_section]<\/p>\n<\/div>","protected":false},"excerpt":{"rendered":"

This project addresses this issue by developing novel methods to help bridge the metrology gap and in turn foster KET innovation. More specifically, this project will push the boundaries of optical measurement methods by realising a new generation of optical metrology systems, with unprecedented performances in terms of spatial resolution, traceability, reliability and robustness.<\/p>\n","protected":false},"author":3,"featured_media":7299,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"inline_featured_image":false,"footnotes":"","_links_to":"","_links_to_target":""},"categories":[82,51],"tags":[],"class_list":["post-7295","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-digitalisation","category-projects","category-82","category-51","description-off"],"acf":[],"yoast_head":"\nPushing boundaries of nano-dimensional metrology by light (20FUN02 POLight) - VSL<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.vsl.nl\/en\/projects\/pushing-boundaries-of-nano-dimensional-metrology-by-light-20fun02-polight\/\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Pushing boundaries of nano-dimensional metrology by light (20FUN02 POLight) - VSL\" \/>\n<meta property=\"og:description\" content=\"This project addresses this issue by developing novel methods to help bridge the metrology gap and in turn foster KET innovation. 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