{"id":16039,"date":"2024-07-04T13:08:38","date_gmt":"2024-07-04T11:08:38","guid":{"rendered":"https:\/\/www.vsl.nl\/?p=16039"},"modified":"2025-08-29T10:21:58","modified_gmt":"2025-08-29T08:21:58","slug":"vsl-scatterometry-facilities-and-activities","status":"publish","type":"post","link":"https:\/\/www.vsl.nl\/en\/news\/vsl-scatterometry-facilities-and-activities\/","title":{"rendered":"VSL scatterometry facilities and activities"},"content":{"rendered":"<div class=\"wpb-content-wrapper\"><p>[vc_section full_width=&#8221;stretch_row&#8221; content_placement=&#8221;middle&#8221; css=&#8221;.vc_custom_1720091106739{background-image: url(https:\/\/www.vsl.nl\/wp-content\/uploads\/2022\/11\/Lab-Foto-WEB-37.jpg?id=2234) !important;background-position: center !important;background-repeat: no-repeat !important;background-size: cover !important;}&#8221; el_class=&#8221;main_header gradient_header dg-position-realtive&#8221;][vc_row equal_height=&#8221;yes&#8221; content_placement=&#8221;middle&#8221; el_class=&#8221;dg-header&#8211;small&#8221;][vc_column width=&#8221;5\/6&#8243; el_class=&#8221;dg-padding-none full_width_responsive&#8221;][vc_column_text css=&#8221;.vc_custom_1756455716597{margin-bottom: 0px !important;padding-bottom: 0px !important;}&#8221; el_class=&#8221;text-white&#8221;]<ins class=\"dg-post--date\" datetime=\"2025-08-29T07:23:56+00:00\">Published on July 4th 2024<\/ins><\/p>\n<h1>VSL scatterometry facilities and activities<\/h1>\n<p>[\/vc_column_text][\/vc_column][vc_column width=&#8221;1\/6&#8243;][\/vc_column][\/vc_row][\/vc_section][vc_section el_class=&#8221;dg-padding-mid&#8221;][vc_row equal_height=&#8221;yes&#8221; content_placement=&#8221;top&#8221;][vc_column el_class=&#8221;full_width_responsive dg-padding-none&#8221;][vc_column_text css=&#8221;&#8221;]<\/p>\n<p class=\"header_subtext\">News<\/p>\n<h2>VSL scatterometry facilities and activities<\/h2>\n<p>[\/vc_column_text][vc_column_text css=&#8221;&#8221;]Optical nanometrology is a hot topic in the high-tech industry. Increasing requirements as well as dimensional shrinkage are the best motivators to improve and develop optical measurement techniques. Check out the video below and have a brief look at the optical scatterometry used for the parametrization of nanostructures.[\/vc_column_text][vc_column_text css=&#8221;&#8221;]This video was recorded based on the research carried out in projects 20IND07 TracOptic, 20IND04 ATMOC and 20FUN02 POLight which have received a funding from the EMPIR program co-financed by the Participating States and from the European Union\u2019s Horizon 2020 research and innovation program.<br \/>\n[\/vc_column_text][vc_video link=&#8221;https:\/\/youtu.be\/m6SXcBmTIP8&#8243; css=&#8221;&#8221;][\/vc_column][\/vc_row][\/vc_section]<\/p>\n<\/div>","protected":false},"excerpt":{"rendered":"<p>Scatterometry facilities and activities at VSL nanometrology laboratory<\/p>\n","protected":false},"author":3,"featured_media":2235,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"inline_featured_image":false,"footnotes":"","_links_to":"","_links_to_target":""},"categories":[79,44,120],"tags":[],"class_list":["post-16039","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-health-and-environment","category-news","category-semiconductors","category-79","category-44","category-120","description-off"],"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.2 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>VSL scatterometry facilities and activities - VSL<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.vsl.nl\/en\/news\/vsl-scatterometry-facilities-and-activities\/\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"VSL scatterometry facilities and activities - VSL\" \/>\n<meta property=\"og:description\" content=\"Scatterometry facilities and activities at VSL nanometrology laboratory\" \/>\n<meta property=\"og:url\" content=\"https:\/\/www.vsl.nl\/en\/news\/vsl-scatterometry-facilities-and-activities\/\" \/>\n<meta property=\"og:site_name\" content=\"VSL\" \/>\n<meta property=\"article:published_time\" content=\"2024-07-04T11:08:38+00:00\" \/>\n<meta property=\"article:modified_time\" content=\"2025-08-29T08:21:58+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/www.vsl.nl\/wp-content\/uploads\/2022\/11\/Lab-Foto-WEB-37.jpg\" \/>\n\t<meta property=\"og:image:width\" content=\"1920\" \/>\n\t<meta property=\"og:image:height\" content=\"823\" \/>\n\t<meta property=\"og:image:type\" content=\"image\/jpeg\" \/>\n<meta name=\"author\" content=\"VSL_admin\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"Written by\" \/>\n\t<meta name=\"twitter:data1\" content=\"VSL_admin\" \/>\n\t<meta name=\"twitter:label2\" content=\"Est. reading time\" \/>\n\t<meta name=\"twitter:data2\" content=\"1 minute\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"Article\",\"@id\":\"https:\/\/www.vsl.nl\/en\/news\/vsl-scatterometry-facilities-and-activities\/#article\",\"isPartOf\":{\"@id\":\"https:\/\/www.vsl.nl\/en\/news\/vsl-scatterometry-facilities-and-activities\/\"},\"author\":{\"name\":\"VSL_admin\",\"@id\":\"https:\/\/www.vsl.nl\/#\/schema\/person\/afec8fd6398b050db8b6014a5370fa23\"},\"headline\":\"VSL scatterometry facilities and activities\",\"datePublished\":\"2024-07-04T11:08:38+00:00\",\"dateModified\":\"2025-08-29T08:21:58+00:00\",\"mainEntityOfPage\":{\"@id\":\"https:\/\/www.vsl.nl\/en\/news\/vsl-scatterometry-facilities-and-activities\/\"},\"wordCount\":258,\"image\":{\"@id\":\"https:\/\/www.vsl.nl\/en\/news\/vsl-scatterometry-facilities-and-activities\/#primaryimage\"},\"thumbnailUrl\":\"https:\/\/www.vsl.nl\/wp-content\/uploads\/2022\/11\/Lab-Foto-WEB-37.jpg\",\"articleSection\":[\"Health and Environment\",\"News\",\"Semiconductors\"],\"inLanguage\":\"en-US\"},{\"@type\":\"WebPage\",\"@id\":\"https:\/\/www.vsl.nl\/en\/news\/vsl-scatterometry-facilities-and-activities\/\",\"url\":\"https:\/\/www.vsl.nl\/en\/news\/vsl-scatterometry-facilities-and-activities\/\",\"name\":\"VSL scatterometry facilities and activities - VSL\",\"isPartOf\":{\"@id\":\"https:\/\/www.vsl.nl\/#website\"},\"primaryImageOfPage\":{\"@id\":\"https:\/\/www.vsl.nl\/en\/news\/vsl-scatterometry-facilities-and-activities\/#primaryimage\"},\"image\":{\"@id\":\"https:\/\/www.vsl.nl\/en\/news\/vsl-scatterometry-facilities-and-activities\/#primaryimage\"},\"thumbnailUrl\":\"https:\/\/www.vsl.nl\/wp-content\/uploads\/2022\/11\/Lab-Foto-WEB-37.jpg\",\"datePublished\":\"2024-07-04T11:08:38+00:00\",\"dateModified\":\"2025-08-29T08:21:58+00:00\",\"author\":{\"@id\":\"https:\/\/www.vsl.nl\/#\/schema\/person\/afec8fd6398b050db8b6014a5370fa23\"},\"breadcrumb\":{\"@id\":\"https:\/\/www.vsl.nl\/en\/news\/vsl-scatterometry-facilities-and-activities\/#breadcrumb\"},\"inLanguage\":\"en-US\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\/\/www.vsl.nl\/en\/news\/vsl-scatterometry-facilities-and-activities\/\"]}]},{\"@type\":\"ImageObject\",\"inLanguage\":\"en-US\",\"@id\":\"https:\/\/www.vsl.nl\/en\/news\/vsl-scatterometry-facilities-and-activities\/#primaryimage\",\"url\":\"https:\/\/www.vsl.nl\/wp-content\/uploads\/2022\/11\/Lab-Foto-WEB-37.jpg\",\"contentUrl\":\"https:\/\/www.vsl.nl\/wp-content\/uploads\/2022\/11\/Lab-Foto-WEB-37.jpg\",\"width\":1920,\"height\":823},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\/\/www.vsl.nl\/en\/news\/vsl-scatterometry-facilities-and-activities\/#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"Home\",\"item\":\"https:\/\/www.vsl.nl\/en\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"VSL scatterometry facilities and activities\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\/\/www.vsl.nl\/#website\",\"url\":\"https:\/\/www.vsl.nl\/\",\"name\":\"VSL\",\"description\":\"Nationaal Metrologisch Instituut\",\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\/\/www.vsl.nl\/?s={search_term_string}\"},\"query-input\":{\"@type\":\"PropertyValueSpecification\",\"valueRequired\":true,\"valueName\":\"search_term_string\"}}],\"inLanguage\":\"en-US\"},{\"@type\":\"Person\",\"@id\":\"https:\/\/www.vsl.nl\/#\/schema\/person\/afec8fd6398b050db8b6014a5370fa23\",\"name\":\"VSL_admin\",\"sameAs\":[\"http:\/\/vsl.nl\"]}]}<\/script>\n<!-- \/ Yoast SEO plugin. -->","yoast_head_json":{"title":"VSL scatterometry facilities and activities - VSL","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/www.vsl.nl\/en\/news\/vsl-scatterometry-facilities-and-activities\/","og_locale":"en_US","og_type":"article","og_title":"VSL scatterometry facilities and activities - VSL","og_description":"Scatterometry facilities and activities at VSL nanometrology laboratory","og_url":"https:\/\/www.vsl.nl\/en\/news\/vsl-scatterometry-facilities-and-activities\/","og_site_name":"VSL","article_published_time":"2024-07-04T11:08:38+00:00","article_modified_time":"2025-08-29T08:21:58+00:00","og_image":[{"width":1920,"height":823,"url":"https:\/\/www.vsl.nl\/wp-content\/uploads\/2022\/11\/Lab-Foto-WEB-37.jpg","type":"image\/jpeg"}],"author":"VSL_admin","twitter_card":"summary_large_image","twitter_misc":{"Written by":"VSL_admin","Est. reading time":"1 minute"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"Article","@id":"https:\/\/www.vsl.nl\/en\/news\/vsl-scatterometry-facilities-and-activities\/#article","isPartOf":{"@id":"https:\/\/www.vsl.nl\/en\/news\/vsl-scatterometry-facilities-and-activities\/"},"author":{"name":"VSL_admin","@id":"https:\/\/www.vsl.nl\/#\/schema\/person\/afec8fd6398b050db8b6014a5370fa23"},"headline":"VSL scatterometry facilities and activities","datePublished":"2024-07-04T11:08:38+00:00","dateModified":"2025-08-29T08:21:58+00:00","mainEntityOfPage":{"@id":"https:\/\/www.vsl.nl\/en\/news\/vsl-scatterometry-facilities-and-activities\/"},"wordCount":258,"image":{"@id":"https:\/\/www.vsl.nl\/en\/news\/vsl-scatterometry-facilities-and-activities\/#primaryimage"},"thumbnailUrl":"https:\/\/www.vsl.nl\/wp-content\/uploads\/2022\/11\/Lab-Foto-WEB-37.jpg","articleSection":["Health and Environment","News","Semiconductors"],"inLanguage":"en-US"},{"@type":"WebPage","@id":"https:\/\/www.vsl.nl\/en\/news\/vsl-scatterometry-facilities-and-activities\/","url":"https:\/\/www.vsl.nl\/en\/news\/vsl-scatterometry-facilities-and-activities\/","name":"VSL scatterometry facilities and activities - VSL","isPartOf":{"@id":"https:\/\/www.vsl.nl\/#website"},"primaryImageOfPage":{"@id":"https:\/\/www.vsl.nl\/en\/news\/vsl-scatterometry-facilities-and-activities\/#primaryimage"},"image":{"@id":"https:\/\/www.vsl.nl\/en\/news\/vsl-scatterometry-facilities-and-activities\/#primaryimage"},"thumbnailUrl":"https:\/\/www.vsl.nl\/wp-content\/uploads\/2022\/11\/Lab-Foto-WEB-37.jpg","datePublished":"2024-07-04T11:08:38+00:00","dateModified":"2025-08-29T08:21:58+00:00","author":{"@id":"https:\/\/www.vsl.nl\/#\/schema\/person\/afec8fd6398b050db8b6014a5370fa23"},"breadcrumb":{"@id":"https:\/\/www.vsl.nl\/en\/news\/vsl-scatterometry-facilities-and-activities\/#breadcrumb"},"inLanguage":"en-US","potentialAction":[{"@type":"ReadAction","target":["https:\/\/www.vsl.nl\/en\/news\/vsl-scatterometry-facilities-and-activities\/"]}]},{"@type":"ImageObject","inLanguage":"en-US","@id":"https:\/\/www.vsl.nl\/en\/news\/vsl-scatterometry-facilities-and-activities\/#primaryimage","url":"https:\/\/www.vsl.nl\/wp-content\/uploads\/2022\/11\/Lab-Foto-WEB-37.jpg","contentUrl":"https:\/\/www.vsl.nl\/wp-content\/uploads\/2022\/11\/Lab-Foto-WEB-37.jpg","width":1920,"height":823},{"@type":"BreadcrumbList","@id":"https:\/\/www.vsl.nl\/en\/news\/vsl-scatterometry-facilities-and-activities\/#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"Home","item":"https:\/\/www.vsl.nl\/en\/"},{"@type":"ListItem","position":2,"name":"VSL scatterometry facilities and activities"}]},{"@type":"WebSite","@id":"https:\/\/www.vsl.nl\/#website","url":"https:\/\/www.vsl.nl\/","name":"VSL","description":"Nationaal Metrologisch Instituut","potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/www.vsl.nl\/?s={search_term_string}"},"query-input":{"@type":"PropertyValueSpecification","valueRequired":true,"valueName":"search_term_string"}}],"inLanguage":"en-US"},{"@type":"Person","@id":"https:\/\/www.vsl.nl\/#\/schema\/person\/afec8fd6398b050db8b6014a5370fa23","name":"VSL_admin","sameAs":["http:\/\/vsl.nl"]}]}},"_links":{"self":[{"href":"https:\/\/www.vsl.nl\/en\/wp-json\/wp\/v2\/posts\/16039","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.vsl.nl\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.vsl.nl\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.vsl.nl\/en\/wp-json\/wp\/v2\/users\/3"}],"replies":[{"embeddable":true,"href":"https:\/\/www.vsl.nl\/en\/wp-json\/wp\/v2\/comments?post=16039"}],"version-history":[{"count":0,"href":"https:\/\/www.vsl.nl\/en\/wp-json\/wp\/v2\/posts\/16039\/revisions"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.vsl.nl\/en\/wp-json\/wp\/v2\/media\/2235"}],"wp:attachment":[{"href":"https:\/\/www.vsl.nl\/en\/wp-json\/wp\/v2\/media?parent=16039"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.vsl.nl\/en\/wp-json\/wp\/v2\/categories?post=16039"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.vsl.nl\/en\/wp-json\/wp\/v2\/tags?post=16039"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}